JPH0548573B2 - - Google Patents

Info

Publication number
JPH0548573B2
JPH0548573B2 JP60130902A JP13090285A JPH0548573B2 JP H0548573 B2 JPH0548573 B2 JP H0548573B2 JP 60130902 A JP60130902 A JP 60130902A JP 13090285 A JP13090285 A JP 13090285A JP H0548573 B2 JPH0548573 B2 JP H0548573B2
Authority
JP
Japan
Prior art keywords
scale
reference line
length
display
sample image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60130902A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61290641A (ja
Inventor
Takashi Kimura
Tetsuo Koseki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Priority to JP60130902A priority Critical patent/JPS61290641A/ja
Publication of JPS61290641A publication Critical patent/JPS61290641A/ja
Publication of JPH0548573B2 publication Critical patent/JPH0548573B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP60130902A 1985-06-18 1985-06-18 試料像のスケール目盛表示装置 Granted JPS61290641A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60130902A JPS61290641A (ja) 1985-06-18 1985-06-18 試料像のスケール目盛表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60130902A JPS61290641A (ja) 1985-06-18 1985-06-18 試料像のスケール目盛表示装置

Publications (2)

Publication Number Publication Date
JPS61290641A JPS61290641A (ja) 1986-12-20
JPH0548573B2 true JPH0548573B2 (en]) 1993-07-21

Family

ID=15045392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60130902A Granted JPS61290641A (ja) 1985-06-18 1985-06-18 試料像のスケール目盛表示装置

Country Status (1)

Country Link
JP (1) JPS61290641A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6476913B1 (en) * 1998-11-30 2002-11-05 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
JP2001357812A (ja) * 2000-06-12 2001-12-26 Jeol Ltd 試料観察画像表示装置
CN106643508A (zh) * 2017-02-28 2017-05-10 成都中科创达软件有限公司 一种用于规则三维对象体积测量的方法和系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543587B2 (en]) * 1974-12-06 1980-11-07
JPS5347262A (en) * 1976-10-09 1978-04-27 Akashi Seisakusho Kk Device for indicating scale of scanning electron microscope
JPS5851664B2 (ja) * 1979-03-28 1983-11-17 株式会社日立製作所 試料像表示装置
JPS6086907U (ja) * 1983-11-18 1985-06-14 日本電子株式会社 電子線像表示装置

Also Published As

Publication number Publication date
JPS61290641A (ja) 1986-12-20

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